SMSI - Products

Products

ROBOT

SMSI launch Robot 900 as the state-of-the-art technical specifications with dual wafer size handling from 300mm to required small wafer size. It stays with the most precise robot solution in the market.

Optimal throughput, reliability and serviceability in a cost-effective package

Ease-of-use to install, teach, program and troubleshoot

Mean Cycle between Failures (MCBF) of > 11 Million

Class I Clean Room Environment

SEMI E15.1-0997, E47.1 mechanical interface standard. Latest S2 standards

Pre-Aligner

SMSI Pre-Aligner

SMSI introduces innovative, high-precision, class 1 clean room compatible pre aligner with integrated scan electronics using high-resolution optical sensing (11.0 microns) to align wafers of (200 mm to 300 mm) without mechanical changes or readjustments. Sensing capabilities automatically align to the major flat or notch. Direct encoder feedback on the wafer chuck and a linear light source provides optimum illumination of the charged couple device (CCD) sensor.

Secs/Gem

FASCom

SMSI have developed the FASCom SECS driver to meet the SECS standard (SEMI Equipment Communication Standard), which is the operating standard of Semiconductor, FPD, and Solar manufacturing equipment, so that manufacturers can develop automation systems more efficiently.

Secs/Gem

FASBasic

SMSI have developed FASBasic GEM driver that complies with the GEM (Generic Equipment Model) standard, the operating standard of semiconductor and FPD production equipment. It helps enable manufacturing facility manufacturers to develop automation systems efficiently.

Repeatability	R Axis	0.05 mm
	T Axis	0.01°
	Z Axis	0.025 mm
Range of Motion	R Axis	625mm
	T Axis	Infinite Rotation
	Z Axis	11.81 in. (300mm)
Speed	R Axis	0.5M/s (Without wafer)
	T Axis	360 deg/s (Without wafer)
	Z Axis	300 mm/s (Without wafer)
Wafer Size		100mm to 300mm
End Effector - Vacuum		√
Mounting		Top
CDM		√
Wafer Map - End Effector		√
Wafer Map - Wrist		√
Weight		Less than 60Kg (133 Lbs)

Accuracy	Angle	±0.01°
	Centering	0.05mm
Initial Offset Allowance		10mm
Wafer Size		200mm and 300mm
Wafer Grip		Vacuum chuck
Dimension	W	152.400mm
	L	312.100mm
	H	259.500mm
Wafer opacity		Si
Clean Room Environment		Class 1